7578 patents
Page 41 of 379
Utility
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber
22 Aug 23
The present disclosure generally provides methods of providing at least metastable radical molecular species and/or radical atomic species to a processing volume of a process chamber during an electronic device fabrication process, and apparatus related thereto.
Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Tobin Kaufman-Osborn, Taewan Kim, Hansel Lo
Filed: 24 Oct 19
Utility
Multilayer encapsulation stacks by atomic layer deposition
22 Aug 23
Methods of depositing an encapsulation stack without damaging underlying layers are discussed.
Cong Trinh, Mihaela A. Balseanu, Maribel Maldonado-Garcia, Ning Li, Mark Saly, Bhaskar Jyoti Bhuyan, Keenan N. Woods, Lisa J. Enman
Filed: 29 Jul 20
Utility
314r4c0zac604npns8a3x1mzi2bkz1ye22t0
22 Aug 23
Process chamber lids, processing chambers and methods using the lids are described.
Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez, Srinivas Gandikota, Wei V. Tang
Filed: 17 Aug 22
Utility
jzs2i1b82v0p8epwqjewzlfsheohpracg4n3qh688zzrn6ph9vqrv bj7l
22 Aug 23
Embodiments disclosed herein include optical sensor systems and methods of using such systems.
Chuang-Chia Lin, Upendra Ummethala, Steven E. Babayan, Lei Lian
Filed: 3 Sep 21
Utility
0xbxs99pdaht7x47r bfx8l26uzaxybjnu
22 Aug 23
Methods of depositing a film selectively onto a first material relative to a second material are described.
Chang Ke, Lei Zhou, Biao Liu, Cheng Pan, Yuanhong Guo, Liqi Wu, Michael S. Jackson, Ludovic Godet, Tobin Kaufman-Osborn, Erica Chen, Paul F. Ma
Filed: 8 Sep 20
Utility
c1din9b9ysh7rttv2p vdq3mo5gl1z
22 Aug 23
A method and apparatus for Marangoni substrate drying is disclosed which includes an adjustable spray bar assembly having mounting brackets coupled to a support structure of a drying system, a base assembly coupled to the mounting brackets and disposed parallel to a face of the support structure, and a mounting assembly coupled to and parallel with the base assembly.
Edwin Velazquez, Jagan Rangarajan
Filed: 2 Dec 19
Utility
8f60v3q701h5vp16pd8q8ouuej4t
22 Aug 23
Semiconductor systems and methods may include a semiconductor processing chamber having a gas box defining an access to the semiconductor processing chamber.
Tien Fak Tan, Lok Kee Loh, Dmitry Lubomirsky, Soonwook Jung, Martin Yue Choy, Soonam Park
Filed: 9 Dec 19
Utility
3rff8boixnek4avaftg19earl756u
22 Aug 23
Embodiments disclosed herein include a processing tool for semiconductor processing.
Kartik Santhanam, Kartik Shah, Wolfgang Aderhold, Martin Hilkene, Stephen Moffatt
Filed: 20 Oct 20
Utility
devb4jdr4vae4o674qodtkirv9hsvtpoj
22 Aug 23
Processing methods may be performed to form an airgap spacer on a semiconductor substrate.
Ashish Pal, Gaurav Thareja, Sankuei Lin, Ching-Mei Hsu, Nitin K. Ingle, Ajay Bhatnagar, Anchuan Wang
Filed: 22 Dec 21
Utility
ip6xz88z4kzpic e7p0bb1ch8
22 Aug 23
Embodiments include process monitoring devices and methods of using such process monitoring devices.
Leonard Tedeschi, Kartik Ramaswamy
Filed: 18 Sep 20
Utility
i2mkznbbgsv5qjzqm65hz19ty852db15i4itjzf8v21 kwbnzhr5r2r1kib
22 Aug 23
Implementations described herein generally relate to metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same.
Girish Kumar Gopalakrishnan Nair, Subramanya P. Herle, Karl J. Armstrong
Filed: 7 Sep 22
Utility
f87o9m9c389hki30qk4zyj78bjimuw3lhpuv5w8u5j9rziuf
22 Aug 23
Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate.
Upendra Ummethala, Philip Kraus, Keith Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar, Shivaraj Manjunath Nara, Anandakumar Parameshwarappa, Sivasankar Nagarajan, Dhirendra Kumar
Filed: 9 Feb 22
Utility
ju5vio7k319eijbb9m0c26dcgr0r3b3qxy7jn7v3b6k58z
22 Aug 23
Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system.
Bindusagar Marath Sankarathodi, Zhiyuan Ye, Jyothi Rajeevan, Ala Moradian, Zuoming Zhu, Errol Antonio C. Sanchez, Patricia M. Liu
Filed: 13 Apr 21
Utility
1e9dhw5qeysd11pliddedlv51ob3e a7max5qj
22 Aug 23
Embodiments of the present disclosure are directed to a system and method for the inspection of products, such as tablets, pills, capsules, caplets, softgels, and other discreet units of consumption that may be ingested by a user.
Asaf Schlezinger
Filed: 29 Jan 21
Utility
mny2co 1opgennlt9jqi5eekxrtcrnewywv5rmlvmrtcgvuupg
22 Aug 23
The systems and methods discussed herein are for the fabrication of diffraction gratings, such as those gratings used in waveguide combiners.
Ludovic Godet, Wayne Mcmillan, Rutger Meyer Timmerman Thijssen
Filed: 16 May 22
Utility
uxb7tl3z9c8rd43e54g85q2z0 e0aziznnaz4t7z7t7uf9o2v49nljepvqnt
22 Aug 23
Operating a substrate processing system includes receiving a plurality of sets of training data, storing a plurality of machine learning models, storing a plurality of physical process models, receiving a selection of a machine learning model from the plurality of machine learning models and a selection of a physical process model from the plurality of physical process models, generating an implemented machine learning model according to the selected machine learning model, calculating a characterizing value for each training spectrum in each set of training data thereby generating a plurality of training characterizing values with each training characterizing value associated with one of the plurality of training spectra, training the implemented machine learning model using the plurality of training characterizing values and plurality of training spectra to generate a trained machine learning model, and passing the trained machine learning model to a control system of the substrate processing system.
Graham Yennie, Benjamin Cherian
Filed: 5 Oct 20
Utility
cb2r92xhc4keyp67pb3zjo
17 Aug 23
Disclosed are approaches for forming semiconductor device cavities.
Armin Saeedi Vahdat, Yan Zhang, John Hautala
Filed: 16 Feb 22
Utility
6ys8g5xm1shi3nng753aw4pbptag8ozgdfy2l4ykfjt
17 Aug 23
The present disclosure provides a method for cleaning a vacuum system used in the manufacture of OLED devices.
Jose Manuel DIEGUEZ-CAMPO, Stefan KELLER, Jae Won LEE, Takashi ANJIKI, Dieter HAAS
Filed: 25 Apr 23
Utility
8vnfm0y3cl8ocw7vsjj6afrnys0k54ehncjnttrrml3z2ap
17 Aug 23
A system may include a first semiconductor processing station configured to deposit a material on a first semiconductor wafer, a second semiconductor processing station configured perform measurements indicative of a thickness of the material after the material has been deposited on the first semiconductor wafer, and a controller.
Eric J. Bergman, Adam Marc McClure, Paul R. McHugh, Gregory J. Wilson, John L. Klocke
Filed: 11 Feb 22
Utility
4sj711xyosod hg47rlkoruxfyzsibj9qq0k3yb
17 Aug 23
A method of forming a polishing pad that has a polishing region and a window region, wherein both regions are made of an interpenetrating polymer network formed from a free-radically polymerized material and a cationically polymerized material.
Uma Sridhar, Sivapackia Ganapathiappan, Ashwin Murugappan Chockalingam, Rajeev Bajaj, Daniel Redfield, Mayu Felicia Yamamura, Yingdong Luo, Nag B. Patibandla
Filed: 21 Apr 23