7578 patents
Page 41 of 379
Utility
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber
22 Aug 23
The present disclosure generally provides methods of providing at least metastable radical molecular species and/or radical atomic species to a processing volume of a process chamber during an electronic device fabrication process, and apparatus related thereto.
Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Tobin Kaufman-Osborn, Taewan Kim, Hansel Lo
Filed: 24 Oct 19
Utility
Multilayer encapsulation stacks by atomic layer deposition
22 Aug 23
Methods of depositing an encapsulation stack without damaging underlying layers are discussed.
Cong Trinh, Mihaela A. Balseanu, Maribel Maldonado-Garcia, Ning Li, Mark Saly, Bhaskar Jyoti Bhuyan, Keenan N. Woods, Lisa J. Enman
Filed: 29 Jul 20
Utility
x95q8ugyvza3u4xaq v3d9t89h0w5kdkre18lmaddbn3qngcfs
22 Aug 23
Process chamber lids, processing chambers and methods using the lids are described.
Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez, Srinivas Gandikota, Wei V. Tang
Filed: 17 Aug 22
Utility
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22 Aug 23
Embodiments disclosed herein include optical sensor systems and methods of using such systems.
Chuang-Chia Lin, Upendra Ummethala, Steven E. Babayan, Lei Lian
Filed: 3 Sep 21
Utility
3lo73siyd9j7bzwadhraa5
22 Aug 23
Methods of depositing a film selectively onto a first material relative to a second material are described.
Chang Ke, Lei Zhou, Biao Liu, Cheng Pan, Yuanhong Guo, Liqi Wu, Michael S. Jackson, Ludovic Godet, Tobin Kaufman-Osborn, Erica Chen, Paul F. Ma
Filed: 8 Sep 20
Utility
ksfx7fsj5lhp3npgwn9r7vu tlzhowya3v2jdeadewvc4ek8
22 Aug 23
A method and apparatus for Marangoni substrate drying is disclosed which includes an adjustable spray bar assembly having mounting brackets coupled to a support structure of a drying system, a base assembly coupled to the mounting brackets and disposed parallel to a face of the support structure, and a mounting assembly coupled to and parallel with the base assembly.
Edwin Velazquez, Jagan Rangarajan
Filed: 2 Dec 19
Utility
zx8q4w4r25tj76th600xn7sg4hyi9p2
22 Aug 23
Semiconductor systems and methods may include a semiconductor processing chamber having a gas box defining an access to the semiconductor processing chamber.
Tien Fak Tan, Lok Kee Loh, Dmitry Lubomirsky, Soonwook Jung, Martin Yue Choy, Soonam Park
Filed: 9 Dec 19
Utility
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22 Aug 23
Embodiments disclosed herein include a processing tool for semiconductor processing.
Kartik Santhanam, Kartik Shah, Wolfgang Aderhold, Martin Hilkene, Stephen Moffatt
Filed: 20 Oct 20
Utility
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22 Aug 23
Processing methods may be performed to form an airgap spacer on a semiconductor substrate.
Ashish Pal, Gaurav Thareja, Sankuei Lin, Ching-Mei Hsu, Nitin K. Ingle, Ajay Bhatnagar, Anchuan Wang
Filed: 22 Dec 21
Utility
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22 Aug 23
Embodiments include process monitoring devices and methods of using such process monitoring devices.
Leonard Tedeschi, Kartik Ramaswamy
Filed: 18 Sep 20
Utility
11il r94p7fasu4l7g84ghx9r4kpdy8n
22 Aug 23
Implementations described herein generally relate to metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same.
Girish Kumar Gopalakrishnan Nair, Subramanya P. Herle, Karl J. Armstrong
Filed: 7 Sep 22
Utility
qz92040zt9kg87athgbtxnj5uh1oaur6bzp9er6ik67dzrmh1t
22 Aug 23
Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate.
Upendra Ummethala, Philip Kraus, Keith Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar, Shivaraj Manjunath Nara, Anandakumar Parameshwarappa, Sivasankar Nagarajan, Dhirendra Kumar
Filed: 9 Feb 22
Utility
xbo4jbwdb09laimwnis4lkytzux30520rs3wk8 omtkqm4zys22kd062
22 Aug 23
Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system.
Bindusagar Marath Sankarathodi, Zhiyuan Ye, Jyothi Rajeevan, Ala Moradian, Zuoming Zhu, Errol Antonio C. Sanchez, Patricia M. Liu
Filed: 13 Apr 21
Utility
23wpdhi2waac6hpyx8sa6josb3mmly1nv xhzhh93d9slhfg7qj6jytcu12
22 Aug 23
Embodiments of the present disclosure are directed to a system and method for the inspection of products, such as tablets, pills, capsules, caplets, softgels, and other discreet units of consumption that may be ingested by a user.
Asaf Schlezinger
Filed: 29 Jan 21
Utility
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22 Aug 23
The systems and methods discussed herein are for the fabrication of diffraction gratings, such as those gratings used in waveguide combiners.
Ludovic Godet, Wayne Mcmillan, Rutger Meyer Timmerman Thijssen
Filed: 16 May 22
Utility
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22 Aug 23
Operating a substrate processing system includes receiving a plurality of sets of training data, storing a plurality of machine learning models, storing a plurality of physical process models, receiving a selection of a machine learning model from the plurality of machine learning models and a selection of a physical process model from the plurality of physical process models, generating an implemented machine learning model according to the selected machine learning model, calculating a characterizing value for each training spectrum in each set of training data thereby generating a plurality of training characterizing values with each training characterizing value associated with one of the plurality of training spectra, training the implemented machine learning model using the plurality of training characterizing values and plurality of training spectra to generate a trained machine learning model, and passing the trained machine learning model to a control system of the substrate processing system.
Graham Yennie, Benjamin Cherian
Filed: 5 Oct 20
Utility
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17 Aug 23
Disclosed are approaches for forming semiconductor device cavities.
Armin Saeedi Vahdat, Yan Zhang, John Hautala
Filed: 16 Feb 22
Utility
87sa3avh0za3t591lqmujiq hha5mvlsk0x3
17 Aug 23
The present disclosure provides a method for cleaning a vacuum system used in the manufacture of OLED devices.
Jose Manuel DIEGUEZ-CAMPO, Stefan KELLER, Jae Won LEE, Takashi ANJIKI, Dieter HAAS
Filed: 25 Apr 23
Utility
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17 Aug 23
A system may include a first semiconductor processing station configured to deposit a material on a first semiconductor wafer, a second semiconductor processing station configured perform measurements indicative of a thickness of the material after the material has been deposited on the first semiconductor wafer, and a controller.
Eric J. Bergman, Adam Marc McClure, Paul R. McHugh, Gregory J. Wilson, John L. Klocke
Filed: 11 Feb 22
Utility
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17 Aug 23
A method of forming a polishing pad that has a polishing region and a window region, wherein both regions are made of an interpenetrating polymer network formed from a free-radically polymerized material and a cationically polymerized material.
Uma Sridhar, Sivapackia Ganapathiappan, Ashwin Murugappan Chockalingam, Rajeev Bajaj, Daniel Redfield, Mayu Felicia Yamamura, Yingdong Luo, Nag B. Patibandla
Filed: 21 Apr 23