7578 patents
Page 25 of 379
Utility
Method for substrate registration and anchoring in inkjet printing
24 Oct 23
A method for printing on a substrate includes printing a support structure by printing a liquid precursor material and curing the liquid precursor material, positioning a substrate within the support structure, printing one or more anchors on the substrate and the support structure by printing and curing the liquid precursor material to secure the substrate to the support structure, and printing one or more device structures on the substrate while anchored by printing and curing the liquid precursor material.
Daihua Zhang, Hou T. Ng, Nag B. Patibandla, Sivapackia Ganapathiappan, Yingdong Luo, Kyuil Cho, Han-Wen Chen
Filed: 2 May 22
Utility
Methods of use of a servo control system
24 Oct 23
Disclosed herein are embodiments of a lift apparatus and systems containing a support and at least one lift apparatus for moving a substrate between the support and a transfer plane, using a servo-control system.
Paul Wirth, Behzad Taheri
Filed: 26 Feb 20
Utility
Methods and apparatus for low resistivity and stress tungsten gap fill
24 Oct 23
Method for forming tungsten gap fill on a structure, including high aspect ratio structures includes depositing a tungsten liner in the structure using a physical vapor deposition (PVD) process with high ionization and an ambient gas of argon or krypton.
Xi Cen, Kai Wu, Min Heon, Wei Min Chan, Tom Ho Wing Yu, Peiqi Wang, Ju Ik Kang, Feihu Wang, Nobuyuki Sasaki, Chunming Zhou
Filed: 28 Oct 20
Utility
Methods of forming microvias with reduced diameter
24 Oct 23
A method for forming microvias for packaging applications is disclosed.
Chintan Buch, Roman Gouk, Steven Verhaverbeke
Filed: 20 Apr 22
Utility
Self-aligned trench MOSFET
24 Oct 23
Methods may include providing a device structure including a well formed in an epitaxial layer, and forming a plurality of shielding layers in the device structure, wherein at least one shielding layer is formed between a pair of adjacent sacrificial gates of a plurality of sacrificial gates.
Qintao Zhang, Samphy Hong, Jason Appell, David J. Lee
Filed: 23 Apr 21
Utility
Low temperature silicon nitride/silicon oxynitride stack film with tunable dielectric constant
24 Oct 23
Methods of forming a stack without damaging underlying layers are discussed.
Maribel Maldonado-Garcia, Cong Trinh, Mihaela A. Balseanu
Filed: 24 Mar 21
Utility
Porous Chemical Mechanical Polishing Pads
19 Oct 23
Implementations disclosed herein generally relate to polishing articles and methods for manufacturing polishing articles used in polishing processes.
Sivapackia GANAPATHIAPPAN, Nag B. PATIBANDLA, Rajeev BAJAJ, Daniel REDFIELD, Fred C. REDEKER, Mahendra C. ORILALL, Boyi FU, Mayu YAMAMURA, Ashwin CHOCKALINGAM
Filed: 24 Apr 23
Utility
Adaptive Settling Time Control for Binary-weighted Charge Redistribution Circuits
19 Oct 23
A method and circuit for performing vector operations may include, for each sequentially performed operation, operating a switch that corresponds to a current bit-order.
Xiaofeng Zhang, She-Hwa Yen
Filed: 20 Jun 23
Utility
Optical Devices Having Barrier Layers to Facilitate Reduced Hardmask Diffusion And/or Hardmask Residue, and Related Methods
19 Oct 23
Embodiments of the present disclosure generally relate to optical devices having barrier layers for reduced hardmask diffusion and/or hardmask residue, and related methods of forming the optical devices.
Rui LI, Takashi KURATOMI, Alexia Adilene PORTILLO RIVERA
Filed: 10 Apr 23
Utility
3D Metrology from 3D Datacube Created from Stack of Registered Images Obtained During Delayering of the Sample
19 Oct 23
A method of evaluating a region of interest of a sample including: positioning the sample within in a vacuum chamber of an evaluation tool that includes a scanning electron microscope (SEM) column and a focused ion beam (FIB) column; acquiring a plurality of two-dimensional images of the region of interest by alternating a sequence of delayering the region of interest with a charged particle beam from the FIB column and imaging a surface of the region of interest with the SEM column; generating an initial three-dimensional data cube representing the region of interest by stacking the plurality of two-dimensional images on top of each other in an order in which they were acquired; identifying distortions within the initial three-dimensional data cube; and creating an updated three-dimensional data cube that includes corrections for the identified distortions.
Ilya Blayvas
Filed: 22 Jun 23
Utility
Freeform Optical Substrates In Waveguide Displays
19 Oct 23
Embodiments of the present disclosure generally relate to methods of forming a substrate having a target thickness distribution at one or more eyepiece areas across a substrate.
David Alexander SELL, Samarth BHARGAVA
Filed: 19 Jun 23
Utility
Scanned Angled Etching Apparatus and Techniques Providing Separate Co-linear Radicals and Ions
19 Oct 23
A system may include a substrate stage, configured to support a substrate, where a main surface of the substrate defines a substrate plane.
Peter F. Kurunczi, Morgan Evans, Joseph C. Olson, Christopher A. Rowland, James Buonodono
Filed: 26 Jun 23
Utility
Machine Learning Model Based Controller for Rapid Thermal Processing Chamber
19 Oct 23
Embodiments disclosed herein include a method of developing a reduced order model (ROM) for a model based controller.
Preetham Rao, Raechel Tan, Ananda Sankar Kundu, Wolfgang Aderhold
Filed: 18 Apr 22
Utility
Area Selective Carbon-Based Film Deposition
19 Oct 23
Methods of selectively depositing a carbon-containing layer are described.
Xinke Wang, Bhaskar Jyoti Bhuyan, Zeqing Shen, Susmit Singha Roy, Abhijit Basu Mallik, Jiecong Tang, John Sudijono, Mark Saly
Filed: 18 Apr 22
Utility
Remote Surface Wave Propagation for Semiconductor Chambers
19 Oct 23
Apparatus provide plasma to a processing volume of a chamber.
Yang YANG, Fernando SILVEIRA, Kartik RAMASWAMY, Yue GUO, A N M Wasekul AZAD, Imad YOUSIF
Filed: 19 Apr 22
Utility
Thermal Process Chamber Lid with Backside Pumping
19 Oct 23
Process chamber lid assemblies and process chambers comprising same are described.
Anqing Cui, Dien-Yeh Wu, Wei V. Tang, Yixiong Yang, Bo Wang
Filed: 12 Jun 23
Utility
Showerhead Assembly with Heated Showerhead
19 Oct 23
Methods and apparatus for substrate processing are described.
Anantha K. SUBRAMANI, Seyyed Abdolreza FAZELI, Yang GUO, Chandrashekara BAGINAGERE, Ramcharan SUNDAR, Yunho KIM, Rajasekhar PATIBANDLA
Filed: 15 Apr 22
Utility
Micro-led Structures and Photoluminescent Materials Having Uv Light Filters
19 Oct 23
Exemplary device structures may include a light emitting diode structure.
Sivapackia Ganapathiappan, Kulandaivelu Sivanandan, Lisong Xu, Mingwei Zhu, Hou T. Ng, Nag Patibandla
Filed: 27 Mar 23
Utility
Method and Chamber for Backside Physical Vapor Deposition
19 Oct 23
Embodiments of the present disclosure generally relate to methods and apparatus for backside stress engineering of substrates to combat film stresses and bowing issues.
Chunming ZHOU, Jothilingam RAMALINGAM, Yong CAO, Kevin Vincent MORAES, Shane LAVAN
Filed: 19 Jun 23
Utility
Methods of Forming Thermally Stable Carbon Film
19 Oct 23
A method of processing a substrate is provided including flowing a deposition gas comprising a hydrocarbon compound and a dopant compound into a process volume having a substrate disposed positioned on a substrate support.
Eswaranand Venkatasubramanian, Rajaram Narayanan, Pramit Manna, Abhijit B. Mallick, Karthik Janakiraman, Jialiang Wang
Filed: 15 Apr 22