3198 patents
Page 25 of 160
Utility
Component, method of manufacturing the component, and method of cleaning the component
4 Jul 23
A component, a method of manufacturing a component, and a method of cleaning a component is provided.
Ian Widlow, Govinda Raj, Gary U. Keppers, Aravind Dugganna Naik, Francisco Rodarte, Sudhir R. Gondhalekar, Ravikumara Kodinaganhalli
Filed: 25 Oct 19
Utility
Backside wafer dopant activation
4 Jul 23
Disclosed herein are methods for backside wafer dopant activation using a high-temperature ion implant.
Qintao Zhang, Wei Zou
Filed: 16 Jun 21
Utility
c8lewoakoz4nzbca9v5s
4 Jul 23
Aspects generally relate to methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers.
Krishna Nittala, Sarah Michelle Bobek, Kwangduk Douglas Lee, Ratsamee Limdulpaiboon, Dimitri Kioussis, Karthik Janakiraman
Filed: 18 Feb 21
Utility
r91xplr35ur8v3asefxw6l0cdzt6zk3yngmtoqhcw54
4 Jul 23
Exemplary semiconductor processing chambers may include a gasbox including a first plate having a first surface and a second surface opposite to the first surface.
Rahul Rajeev, Yunzhe Yang, Abhijit A. Kangude, Kedar Joshi
Filed: 22 Oct 20
Utility
uohmsxpcz3vgckrw0j2uqjok akput7arpk2w5
4 Jul 23
Embodiments of the disclosure relate to an apparatus and method for annealing one or more semiconductor substrates.
Jean Delmas, Steven Verhaverbeke, Kurtis Leschkies
Filed: 25 May 21
Utility
gy6hjflsiknjzd07zd hgefgde40lc3i8zfbog8e4h9r0ipc5pjvzchm486
4 Jul 23
Implementations described herein relate to pressure control for vacuum chuck substrate supports.
Dongming Iu, Mehran Behdjat
Filed: 21 Mar 17
Utility
b33om23ytcim0ylsc87a1sqnzyseh1506dkwim472095r2u
27 Jun 23
A showerhead with an embedded nut is disclosed.
Kenneth Brian Doering
Filed: 16 Nov 20
Utility
503ky30d015stofudkihqkb0v5c8vjvvaf
27 Jun 23
Methods and formulations for manufacturing polishing articles used in polishing processes are provided.
Sivapackia Ganapathiappan, Ankit Vora, Boyi Fu, Venkat Hariharan, Mayu Yamamura, Mario Cornejo, Igor Abramson, Mo Yang, Daniel Redfield, Rajeev Bajaj, Nag B. Patibandla
Filed: 2 Aug 19
Utility
0cskh o2qqy9rde5ax4tppeqi8drc2acs8d71f
27 Jun 23
Processing chamber components and methods of manufacture of same are provided herein.
Cariappa Baduvamanda, Ong Pang Yen, Lit Ping Lam
Filed: 8 Dec 17
Utility
e42gb4ownur9frzm7rfu2 xelqbw2938einuhcte1er3kw2ssiud
27 Jun 23
Electroplating methods and systems are described that include adding a metal-ion-containing starting solution to a catholyte to increase a metal ion concentration in the catholyte to a first metal ion concentration.
Kwan Wook Roh, Charles Sharbono, Kyle M. Hanson
Filed: 28 Jan 22
Utility
3816 uihz66x91z7674wp7
27 Jun 23
There is provided a system and method of a method of detecting a local shape deviation of a structural element in a semiconductor specimen, comprising: obtaining an image comprising an image representation of the structural element; extracting, from the image, an actual contour of the image representation; estimating a reference contour of the image representation indicative of a standard shape of the structural element, wherein the reference contour is estimated based on a Fourier descriptor representative of the reference contour, the Fourier descriptor being estimated using an optimization method based on a loss function specifically selected to be insensitive to local shape deviation of the actual contour; and performing one or more measurements representative of one or more differences between the actual contour and the reference contour, the measurements indicative of whether a local shape deviation is present in the structural element.
Roman Kris, Ilan Ben-Harush, Rafael Bistritzer, Vadim Vereschagin, Elad Sommer, Grigory Klebanov, Arundeepth Thamarassery, Jannelle Anna Geva, Gal Daniel Gutterman, Einat Frishman, Sahar Levin
Filed: 2 Sep 21
Utility
0rv73drrajx3sssroz7s8j8kuhqgt0zay7kmhwnjnddaa2fb
27 Jun 23
There is provided a system and method of automatic optimization of an examination recipe.
Amir Bar
Filed: 17 Mar 22
Utility
oxek2xcc6nltc2x2a7hsrubsjouo4mxh847cps4yttrtk9khc5e0ffpdz6b4
27 Jun 23
A method and a system for preparing a substrate with three dimensional features for immersion based inspection.
Tai Kuzniz
Filed: 14 Feb 22
Utility
gtlpxpxwio9p4k1yicp3xp4bh6kr2a5i08o
27 Jun 23
According to an embodiment, a method for automated critical dimension measurement on a substrate for display manufacturing is provided.
Bernhard G. Mueller, Robert Trauner, Bernhard Schüler, Peter C. Staffansson, Kulpreet Singh Virdi, Volker Daiker
Filed: 22 Feb 18
Utility
itafcc36d03x07mc5pupf
27 Jun 23
Disclosed is a computerized method for detecting defects on a sample.
Guy Shwartz, Ido Almog
Filed: 27 Jan 21
Utility
gthtnjw9plusz5z0td6uzm56kju6
27 Jun 23
Certain aspects of the present disclosure provide techniques for automatically detecting and classifying tumor regions in a tissue slide.
Parijat Prakash Prabhudesai, Ganesh Kumar Mohanur Raghunathan, Sumit Kumar Jha, Aditya Sista, Narasimha Murthy Chandan
Filed: 21 Apr 21
Utility
rtiqp1yjp96iavrraaaw sp8vxxgtqnjvl8aouivdpgwl7ldrb8mbl3z
27 Jun 23
A method for determining whether to modify a manufacturing process recipe is provided.
Upendra V. Ummethala, Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu
Filed: 19 Jul 21
Utility
jmlup5n1ddtn9pzml4rla9bq49s
27 Jun 23
A method and apparatus for loading substrates in an inspection station is disclosed herein.
Asaf Schlezinger, Markus J. Stopper
Filed: 10 Dec 20
Utility
pf0j jxyoc41ufhu2i5zec
27 Jun 23
ABSTRACT OF THE DISCLOSURE The present disclosure generally relates to battery anode structures with dielectric coating and methods of forming the same.
Subramanya P. Herle
Filed: 26 Sep 19
Utility
p3tyz8wmwefb7p2fldh5cq37czzfq6y4e1aw
27 Jun 23
Embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display.
Ji Young Choung, Dieter Haas, Yu-hsin Lin, Jungmin Lee, Seong Ho Yoo, Si Kyoung Kim
Filed: 26 Oct 22