3198 patents
Page 21 of 160
Utility
Non-contact clean module
8 Aug 23
A cleaning module for cleaning a wafer comprises a wafer gripping device configured to support a wafer in a vertical orientation and comprises a catch cup and a gripper assembly.
Jagan Rangarajan, Adrian Blank, Edward Golubovsky, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga, Ekaterina Mikhaylichenko, Michael A. Anderson, Jonathan P. Domin
Filed: 21 Oct 21
Utility
Sensor assembly and methods of vapor monitoring in process chambers
8 Aug 23
Methods and systems for monitoring film thickness using a sensor assembly include a process chamber having a chamber body, a substrate support disposed in the chamber body, a lid disposed over the chamber body, and a sensor assembly coupled to the chamber body at a lower portion of the sensor assembly.
Xiaozhou Che, Graeme Jamieson Scott, Richard Gustav Hagborg, Alan H. Ouye, Nelson A. Yee
Filed: 13 Jul 21
Utility
bsloa6jhmtxgzqalrjgkp57h6glhfe
8 Aug 23
In an embodiment, a semiconductor processing tool for implementing hybrid laser and plasma dicing of a substrate is provided.
Sriskantharajah Thirunavukarasu, Karthik Balakrishnan, Karthik Elumalai, Eng Sheng Peh
Filed: 10 Aug 20
Utility
sekoeiiwubigfyudtlm64xoabuykxrwlw9qju4l60gbx4ghhpcjllmp2
8 Aug 23
Examples disclosed herein are directed to a method and apparatus for determining a position of a ring within a process kit.
Andrew Myles, Andreas Schmid, Phillip A. Criminale, Steven E. Babayan
Filed: 18 Jun 21
Utility
cl24zwpnl4fyxqyztydc8o6yri79tln925083tabbvx99bm
8 Aug 23
A method of fabricating a high electron mobility transistor is disclosed.
Qintao Zhang, Wei Zou, Samphy Hong
Filed: 22 Dec 20
Utility
7vjvhu6szdgfobbfubps5f
8 Aug 23
Embodiments of the present disclosure generally include spin-orbit torque magnetoresistive random-access memory (SOT-MRAM) devices and methods of manufacture thereof.
Minrui Yu, Wenhui Wang, Jaesoo Ahn, Jong Mun Kim, Sahil Patel, Lin Xue, Chando Park, Mahendra Pakala, Chentsau Chris Ying, Huixiong Dai, Christopher S. Ngai
Filed: 11 May 20
Utility
z1l8p1s66fitna475tc64ys1s6zrdw l9gswc6ki60qrycnzbn1nk
1 Aug 23
A depositing arrangement for evaporation of a material is disclosed herein.
Stefan Keller, Uwe Schüssler, Jose Manuel Dieguez-Campo, Stefan Bangert, Byung-Sung Kwak
Filed: 5 Nov 18
Utility
a4cxj6vos9he41ev3z5qvka0kc9xl3hilgdy fxcofu
1 Aug 23
Shuaidi Zhang, Ning Li, Mihaela A. Balseanu
Filed: 15 Jun 22
Utility
bxi7onj5lr86dzfh3kmjo1vtiv32mboh434vnqdlb4mk1y9n
1 Aug 23
Processing chambers and methods to disrupt the boundary layer are described.
Kevin Griffin, Sanjeev Baluja, Joseph AuBuchon, Mario D. Silvetti, Hari Ponnekanti
Filed: 21 Jun 22
Utility
iecccm3f2clac80rabrfo1enr27w
1 Aug 23
Disclosed herein is a system for profiling holes in non-opaque samples.
David Goldovsky, Ido Almog, Ronny Barnea
Filed: 12 Jan 22
Utility
q2c5f2pqv0y0evps6t1cniofr1xyfo8 rgkztbo
1 Aug 23
A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers.
Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril, Chahal Neema, Vishal Suresh Jamakhandi, Abhijit Ashok Kangude
Filed: 29 Sep 22
Utility
1f7l3u92gtiwohivwuy4n0m5oqi31rc4jg naxolhkaa3p1ai
1 Aug 23
A metrology technique for analyzing a substrate includes storing data indicating a boundary of an area in a 2-dimensional color space having a pair of color channels including a first color channel and a second color channel as axes of the color space, receiving color data of a substrate from a camera, generating a color image of the substrate from the color data, performing a comparison of a pair of color values for the pair of color channels for the pixel to the boundary of the area in the 2-dimensional color space for each pixel of a plurality of pixels of the color image to determine whether the pair of color values meet thresholds provided by the boundary, and generating a signal to an operator based on results of the comparison for the plurality of pixels.
Dominic J. Benvegnu, Robert D. Tolles, Boguslaw A. Swedek, Abraham Ravid
Filed: 15 Jan 20
Utility
qpihsrt3b5t32b2m22f suezm62y4z2rml7libe8ep
1 Aug 23
A system may include a substrate stage, configured to support a substrate, where a main surface of the substrate defines a substrate plane.
Peter F. Kurunczi, Morgan Evans, Joseph C. Olson, Christopher A. Rowland, James Buonodono
Filed: 8 Aug 19
Utility
iujze1sf87i5ztkhp3jlljyxabkhpi42zte2tjg1ks2159
1 Aug 23
Exemplary semiconductor processing systems may include a pedestal configured to support a semiconductor substrate.
Greg Toland, Kenneth D. Schatz, Laksheswar Kalita, Dmitry Lubomirsky
Filed: 10 Sep 20
Utility
xwzr13nam07s7oqsdxh6lwe6kiaxydv2jigrz
1 Aug 23
Embodiments of the present disclosure are related to carrier assemblies that can clamp more than one optical device substrates and methods for forming the carrier assemblies.
Benjamin B. Riordon, James D. Strassner
Filed: 11 Dec 20
Utility
9kjxgktvelfnozrk9v97rk9esmcqwnhvyfps
1 Aug 23
Process chamber lid assemblies and process chambers comprising same are described.
Anqing Cui, Dien-Yeh Wu, Wei V. Tang, Yixiong Yang, Bo Wang
Filed: 14 Apr 22
Utility
xthyqw236emn7j36o386npyv
1 Aug 23
A method of detecting a polishing endpoint includes storing a plurality of library spectra, measuring a sequence of spectra from the substrate in-situ during polishing, and for each measured spectrum of the sequence of spectra, finding a best matching library spectrum from the plurality of library spectra to generate a sequence of best matching library spectra.
Dominic J. Benvegnu, Jeffrey Drue David, Boguslaw A. Swedek
Filed: 18 Nov 21
Utility
tnqe74wrzm3mousvte6jxqq0gng4lnnmsmav1ob
1 Aug 23
The present disclosure relates to thin-form-factor reconstituted substrates and methods for forming the same.
Han-Wen Chen, Steven Verhaverbeke, Guan Huei See, Giback Park, Giorgio Cellere, Diego Tonini, Vincent Dicaprio, Kyuil Cho
Filed: 12 Apr 21
Utility
1ut0ywdplb kdiqhxsy9k13mtpffm9cf8ii28ap7sjur9prs
1 Aug 23
Methods for integrating an image sensor and a light emitting diode (LED) leverage conformal depositions to achieve a single-sided, same height arrangement of contacts.
Taichou Papo Chen
Filed: 30 Dec 20
Utility
1qiv83skk akd713h9jzz58t8158g6pjw82l5nehy5hpjeq8gdro
1 Aug 23
Processing methods may be performed to form an airgap in a semiconductor structure.
Angada B. Sachid
Filed: 19 Oct 20