3198 patents
Page 19 of 160
Utility
Process monitor device having a plurality of sensors arranged in concentric circles
22 Aug 23
Embodiments include process monitoring devices and methods of using such process monitoring devices.
Leonard Tedeschi, Kartik Ramaswamy
Filed: 18 Sep 20
Utility
Ex-situ solid electrolyte interface modification using chalcogenides for lithium metal anode
22 Aug 23
Implementations described herein generally relate to metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same.
Girish Kumar Gopalakrishnan Nair, Subramanya P. Herle, Karl J. Armstrong
Filed: 7 Sep 22
Utility
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22 Aug 23
Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate.
Upendra Ummethala, Philip Kraus, Keith Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar, Shivaraj Manjunath Nara, Anandakumar Parameshwarappa, Sivasankar Nagarajan, Dhirendra Kumar
Filed: 9 Feb 22
Utility
zz2gvu0mvpfpl06hm8cmtncjjcmhvk
22 Aug 23
Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system.
Bindusagar Marath Sankarathodi, Zhiyuan Ye, Jyothi Rajeevan, Ala Moradian, Zuoming Zhu, Errol Antonio C. Sanchez, Patricia M. Liu
Filed: 13 Apr 21
Utility
k0lho67v74buinqup8jxg9kvrrix2ogqscf6k5qo41jfh98k0v
22 Aug 23
Embodiments of the present disclosure are directed to a system and method for the inspection of products, such as tablets, pills, capsules, caplets, softgels, and other discreet units of consumption that may be ingested by a user.
Asaf Schlezinger
Filed: 29 Jan 21
Utility
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22 Aug 23
The systems and methods discussed herein are for the fabrication of diffraction gratings, such as those gratings used in waveguide combiners.
Ludovic Godet, Wayne Mcmillan, Rutger Meyer Timmerman Thijssen
Filed: 16 May 22
Utility
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22 Aug 23
Operating a substrate processing system includes receiving a plurality of sets of training data, storing a plurality of machine learning models, storing a plurality of physical process models, receiving a selection of a machine learning model from the plurality of machine learning models and a selection of a physical process model from the plurality of physical process models, generating an implemented machine learning model according to the selected machine learning model, calculating a characterizing value for each training spectrum in each set of training data thereby generating a plurality of training characterizing values with each training characterizing value associated with one of the plurality of training spectra, training the implemented machine learning model using the plurality of training characterizing values and plurality of training spectra to generate a trained machine learning model, and passing the trained machine learning model to a control system of the substrate processing system.
Graham Yennie, Benjamin Cherian
Filed: 5 Oct 20
Utility
avkarcamf8n5mxiq7zf4mavsdovpgqmvqo
15 Aug 23
Methods and systems for additive manufacturing can include a modular spreader unit including multiple spreaders that collectively span the width of a large build area.
Hou T. Ng, Daihua Zhang, Nag B. Patibandla
Filed: 14 Jul 21
Utility
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15 Aug 23
Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same.
Jennifer Y. Sun, Vahid Firouzdor, David Koonce, Biraja Prasad Kanungo
Filed: 7 Jun 22
Utility
2n97cyobyd2rktltqeg0oxf 6e08yznredjz7hm985mrn
15 Aug 23
A method and apparatus for dispensing polishing fluids and onto a polishing pad within a chemical mechanical polishing (CMP) system are disclosed herein.
Justin H. Wong, Kevin H. Song
Filed: 30 Sep 20
Utility
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15 Aug 23
A carrier head includes a base assembly, a substrate mounting surface connected to the base assembly, a plurality of segments disposed circumferentially around the substrate mounting surface to provide a collet retaining ring to surround a substrate mounted on the substrate mounting surface, and an outer ring that is vertically movable relative to the plurality of segments.
Steven M. Zuniga, Jay Gurusamy, Andrew J. Nagengast
Filed: 11 Nov 22
Utility
l8gugyt4qa981jlkzfy6uxdwltms6zj5p7wynajc691jvdgr09ale gk
15 Aug 23
Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same.
Rajeev Bajaj, Daniel Redfield, Mahendra C. Orilall, Boyi Fu, Aniruddh Jagdish Khanna, Jason G. Fung, Ashwin Chockalingam, Mayu Yamamura, Veera Raghava Reddy Kakireddy, Gregory E. Menk, Nag B. Patibandla
Filed: 8 Dec 20
Utility
f6dxoqlvrrzvm5v42uqopoaynpmq3sdo4s9m1qsu6fnra6j4br4tbaxa
15 Aug 23
Exemplary etching methods may include flowing an oxygen-containing precursor into a remote plasma region of a semiconductor processing chamber while striking a plasma to produce oxygen plasma effluents.
Baiwei Wang, Oliver Jan, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui, Anchuan Wang
Filed: 11 Feb 21
Utility
rscw7vatrx4ek0t3qqm820tb24ss8kygcu
15 Aug 23
The present disclosure relates to a method and apparatus for cleaning a substrate.
Jianshe Tang, Wei Lu, Haosheng Wu, Taketo Sekine, Shou-Sung Chang, Hari N. Soundararajan, Chad Pollard
Filed: 5 Jan 21
Utility
ht96ap80xzh36ipchoq59aaad4yr8oca10mlxv3g4xuoowylpdk673hogzc9
15 Aug 23
Embodiments described herein relate to apparatus and methods for processing a substrate.
Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet, Qiwei Liang, Adib Khan
Filed: 6 Jun 19
Utility
kvxcm9rjl165wpk2t6y6urwg6y6cyrvy5mr5t1fdn8ccf6kp4bl4utom9
15 Aug 23
Systems and methods for creating arbitrarily-shaped ion energy distribution functions using shaped-pulse-bias.
Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Philip A. Kraus, Rajinder Dhindsa, James Rogers
Filed: 16 Jul 21
Utility
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15 Aug 23
A method of evaluating a region of interest of a sample including: positioning the sample within in a vacuum chamber of an evaluation tool that includes a scanning electron microscope (SEM) column and a focused ion beam (FIB) column; acquiring a plurality of two-dimensional images of the region of interest by alternating a sequence of delayering the region of interest with a charged particle beam from the FIB column and imaging a surface of the region of interest with the SEM column; generating an initial three-dimensional data cube representing the region of interest by stacking the plurality of two-dimensional images on top of each other in an order in which they were acquired; identifying distortions within the initial three-dimensional data cube; and creating an updated three-dimensional data cube that includes corrections for the identified distortions.
Ilya Blayvas
Filed: 24 Jun 21
Utility
pk3iw72wet2sdnok352rvfooq2vgtnm3ghqra81xdnqh3swgp
15 Aug 23
An apparatus may include an exciter, disposed within a resonance chamber, to generate an RF power signal.
Keith E. Kowal
Filed: 28 Oct 21
Utility
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15 Aug 23
A method and apparatus for substrate etching are described herein.
Toan Q. Tran, Soonam Park, Junghoon Kim, Dmitry Lubomirsky
Filed: 31 Mar 21
Utility
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15 Aug 23
A gas distribution hub for a plasma chamber.
Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna
Filed: 1 Feb 22