229 patents
Page 5 of 12
Utility
Methods for Etching a Semiconductor Structure and for Conditioning a Processing Reactor
24 Nov 22
Methods for etching a semiconductor structure and for conditioning a processing reactor in which a single semiconductor structure is treated are disclosed.
Gang Wang
Filed: 13 May 21
Utility
Methods for Conditioning a Processing Reactor
17 Nov 22
Methods for etching a semiconductor structure and for conditioning a processing reactor in which a single semiconductor structure is treated are disclosed.
Gang Wang
Filed: 13 May 21
Utility
Methods for Conditioning a Processing Reactor
17 Nov 22
Methods for etching a semiconductor structure and for conditioning a processing reactor in which a single semiconductor structure is treated are disclosed.
Gang Wang
Filed: 9 Jun 22
Utility
Material Analysis Method
10 Nov 22
A material analysis method is provided.
Shang-Chi Wang, Wen-Ching Hsu, Chia-Chi Tsai, I-Ching Li
Filed: 4 May 22
Utility
Methods for Forming an Epitaxial Wafer
10 Nov 22
Methods for preparing epitaxial wafers are disclosed.
Maria Porrini, Pietro Valcozzena
Filed: 4 Apr 22
Utility
Methods for Producing Silicon Ingots by Horizontal Magnetic Field Czochralski
3 Nov 22
Method for producing a silicon ingot in which a horizontal magnetic field is generated are disclosed.
JaeWoo Ryu, Parthiv Daggolu, Soubir Basak, Nan Zhang
Filed: 27 Apr 22
Utility
Methods and Systems of Image Based Robot Alignment
3 Nov 22
A system for monitoring alignment of a second component relative to a first component includes a camera, and a controller including a processor and a nontransitory memory.
TaeHyeong Kim, JaeKoo Kang, Soon Sung Park
Filed: 7 Apr 22
Utility
Fabrication Method of Semiconductor Substrate
20 Oct 22
A fabrication method of a semiconductor substrate includes: performing a chemical mechanical polishing process on a silicon carbide wafer; and performing a heating process on the silicon carbide wafer to remove a naturally formed oxide layer, to remove contaminants, to obtain a scratch-free surface, and to planarize, wherein the heating process includes: heating a chamber of a furnace and the silicon carbide wafer to T degrees Celsius for a time t, and introducing hydrogen, argon, nitrogen, or/and hydrogen chloride into the chamber; and then cooling down the furnace.
Chin Chen Chiu, Hao-Wei Peng
Filed: 6 Apr 22
Utility
Production and Use of Dynamic State Charts When Growing a Single Crystal Silicon Ingot
20 Oct 22
Methods for growing a single crystal silicon ingot are disclosed.
Giorgio Agostini, Stephan Haringer, Marco Zardoni
Filed: 6 Jul 22
Utility
Systems and Methods for Enhanced Wafer Manufacturing
20 Oct 22
A computer device includes at least one processor in communication with at least one memory device.
Sumeet S. Bhagavat
Filed: 6 Jul 22
Utility
Wafer Processing System and Rework Method Thereof
13 Oct 22
A wafer processing system and a rework method thereof are provided.
Shang-Chi Wang, Cheng-Jui Yang, Miao-Pei Chen, Han-Zong Wu
Filed: 6 Jan 22
Utility
Wafer Inspection Method and Apparatus Thereof
6 Oct 22
The disclosure provides a wafer inspection method and wafer inspection apparatus.
Shang-Chi Wang, Miao-Pei Chen, Han-Zong Wu, Chia-Chi Tsai, I-Ching Li
Filed: 27 Jan 22
Utility
Wafer Surface Defect Inspection Method and Apparatus Thereof
29 Sep 22
A wafer surface defect inspection method and a wafer surface defect inspection apparatus are provided.
Shang-Chi Wang, Miao-Pei Chen, Han-Zong Wu, Chia-Chi Tsai, I-Ching Li
Filed: 13 Jan 22
Utility
Wafer
29 Sep 22
Provided is a wafer including a ring part and a processed part.
Chan-Ju Wen, Chih-Wei Chang, Su Lien Chou
Filed: 24 Jan 22
Utility
Automated Optical Inspection Method, Automated Optical Inspection System and Storage Medium
25 Aug 22
Cheng-Wei Gu, Shang-Chi Wang, Chia-Yeh Lee
Filed: 4 Jan 22
Utility
Purification Apparatus and Method of Purifying Hot Zone Parts
25 Aug 22
A purification apparatus and a method of purifying hot zone parts are provided.
Chung-Sheng Chang, Masami Nakanishi, YU-SHENG SU, YEN-HSUN CHU, YUNG-CHI WU, Yi-Hua Fan
Filed: 24 Feb 22
Utility
Methods and Systems of Capturing Transient Thermal Responses of Regions of Crystal Pullers
18 Aug 22
A system for producing a silicon ingot, the system includes a crystal puller, a pyrometer, an infrared (IR) camera, and a controller.
Zheng Lu, Chi-Yung Chen, Hsien-Ta Tseng, Sumeet S. Bhagavat, Vahid Khalajzadeh
Filed: 15 Feb 22
Utility
Systems and Methods for Production of Silicon Using a Horizontal Magnetic Field
21 Jul 22
A method for producing a silicon ingot by the horizontal magnetic field Czochralski method includes rotating a crucible containing a silicon melt, applying a horizontal magnetic field to the crucible, contacting the silicon melt with a seed crystal, and withdrawing the seed crystal from the silicon melt while rotating the crucible to form a silicon ingot.
JaeWoo Ryu, JunHwan Ji, WooJin Yoon, Richard J. Phillips, Carissima Marie Hudson
Filed: 5 Apr 22
Utility
Crucible Molds
21 Jul 22
Methods for forming a unitized crucible assembly for holding a melt of silicon for forming a silicon ingot are disclosed.
Richard Joseph Phillips, Salvador Zepeda, Patrick Fredrick Boegemann, III, William Luter
Filed: 1 Apr 22
Utility
CorrectedProcess for Preparing Ingot Having Reduced Distortion at Late Body Length
14 Jul 22
A method for growing a single crystal silicon ingot by the Czochralski method having reduced deviation in diameter is disclosed.
Tapas Jain, Sumeet S. Bhagavat, Zheng Lu, Feng-Chien Tsai, Hong-Huei Huang
Filed: 3 Apr 20