229 patents
Page 7 of 12
Utility
Cleaved Semiconductor Wafer Imaging System
17 Mar 22
A semiconductor wafer processing system for processing a semiconductor wafer includes a semiconductor wafer processing station for processing the semiconductor wafer and a semiconductor wafer imaging system that images the semiconductor wafer after the semiconductor wafer processing station processes the semiconductor wafer.
Benjamin Michael Meyer, Justin Scott Kayser, John F. Valley, James Dean Eoff, Vandan Tanna, William L. Luter
Filed: 13 Sep 21
Utility
Method of Processing a Cleaved Semiconductor Wafer
17 Mar 22
A method of detecting defects on a semiconductor wafer includes directing diffuse light to the semiconductor wafer and reflecting the diffuse light off of the semiconductor wafer.
Benjamin Michael Meyer, Justin Scott Kayser, John F. Valley, James Dean Eoff, Vandan Tanna, William L. Luter
Filed: 13 Sep 21
Utility
Cleaved Semiconductor Wafer Camera System
17 Mar 22
A semiconductor wafer imaging system for imaging a semiconductor wafer includes shroud panels defining a black box, a camera positioned in the black box for imaging the semiconductor wafer, and an illumination panel for directing diffuse light to the semiconductor wafer.
Benjamin Michael Meyer, Justin Scott Kayser, John F. Valley, James Dean Eoff, Vandan Tanna, William L. Luter
Filed: 13 Sep 21
Utility
Crystal Pulling Systems Having a Cover Member for Covering the Silicon Charge and Methods for Growing a Melt of Silicon In a Crucible Assembly
3 Mar 22
Crystal pulling system having a housing and a crucible assembly are disclosed.
Paolo Tosi, Matteo Pannocchia, Roberto Scala
Filed: 6 Aug 21
Utility
Window for Chemical Vapor Deposition Systems and Related Methods
24 Feb 22
A system for depositing a layer on a substrate includes a processing chamber defining a gas inlet for introducing gas into the processing chamber and a gas outlet to allow the gas to exit the processing chamber.
Chun-Chin Tu, Manabu Hamano, Lunghsing Hsu
Filed: 12 Aug 21
Utility
High Resistivity Single Crystal Silicon Ingot and Wafer Having Improved Mechanical Strength
24 Feb 22
A method for preparing a single crystal silicon ingot and a wafer sliced therefrom are provided.
Soubir Basak, Igor Peidous, Carissima Marie Hudson, HyungMin Lee, ByungChun Kim, Robert J. Falster
Filed: 10 Sep 21
Utility
Manufacturing Method of Silicon Carbide Ingot
17 Feb 22
A manufacturing method of a silicon carbide ingot includes the following.
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Silicon Carbide Wafer and Method of Fabricating the Same
17 Feb 22
A silicon carbide wafer is provided, wherein within a range area of 5 mm from an edge of the silicon carbide wafer, there are no low angle grain boundaries formed by clustering of basal plane dislocation defects, and the silicon carbide wafer has a bowing of less than 15 μm.
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Method of Fabricating Silicon Carbide Material
27 Jan 22
A method of fabricating a silicon carbide material is provided.
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Silicon Carbide Seed Crystal and Method of Manufacturing the Same, and Method of Manufacturing Silicon Carbide Ingot
27 Jan 22
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Manufacturing Method of Silicon Carbide Wafer and Semiconductor Structure
27 Jan 22
A manufacturing method of a silicon carbide wafer includes the following.
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Silicon Carbide Ingot and Method of Fabricating the Same
27 Jan 22
A silicon carbide ingot is provided, which includes a seed end, and a dome end opposite to the seed end.
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Crystal Ingot Cutting Device and Crystal Ingot Cutting Method
27 Jan 22
A crystal ingot cutting device and a crystal ingot cutting method are provided.
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Methods for Producing a Monocrystalline Ingot by Horizontal Magnetic Field Czochralski
27 Jan 22
Methods for producing monocrystalline silicon ingots by horizontal magnetic field Czochralski are disclosed.
JaeWoo Ryu, Carissima Marie Hudson, JunHwan Ji, WooJin Yoon
Filed: 25 May 21
Utility
Silicon Carbide Seed Crystal and Method of Manufacturing Silicon Carbide Ingot
27 Jan 22
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Silicon Carbide Wafer and Method of Fabricating the Same
27 Jan 22
A silicon carbide wafer and a method of fabricating the same are provided.
Ching-Shan Lin, Chien-Cheng Liou, Jian-Hsin Lu
Filed: 27 Jul 21
Utility
Bonding Wafer Structure and Method of Manufacturing the Same
27 Jan 22
A bonding wafer structure includes a support substrate, a bonding layer, and a silicon carbide (SiC) layer.
Ying-Ru Shih, Wei Li Wu, Hung-Chang Lo
Filed: 7 Jul 21
Utility
Automated Semiconductor Substrate Polishing and Cleaning
27 Jan 22
A semiconductor wafer processing system for processing a set of semiconductor wafers includes a controller, a transfer robot controlled by the controller, a wet bath for containing a cleaning solution, and a cassette positioned in the wet bath for holding the set of wafers.
ShinBae Park, SangJun Kim
Filed: 21 Jul 20
Utility
High Resistivity Single Crystal Silicon Ingot and Wafer Having Improved Mechanical Strength
30 Dec 21
A method for preparing a single crystal silicon ingot and a wafer sliced therefrom are provided.
Soubir Basak, Igor Peidous, Carissima Marie Hudson, HyungMin Lee, ByungChun Kim, Robert J. Falster
Filed: 10 Sep 21
Utility
Wafer Boats for Supporting Semiconductor Wafers In a Furnace
30 Dec 21
A wafer boat for supporting a plurality of semiconductor wafers in a furnace is disclosed.
Sumeet S. Bhagavat, Qingmin Liu
Filed: 23 Jun 21