386 patents
Page 11 of 20
Utility
Silicon Carbide Ingot and Method of Fabricating the Same
27 Jan 22
A silicon carbide ingot is provided, which includes a seed end, and a dome end opposite to the seed end.
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Crystal Ingot Cutting Device and Crystal Ingot Cutting Method
27 Jan 22
A crystal ingot cutting device and a crystal ingot cutting method are provided.
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Silicon Carbide Seed Crystal and Method of Manufacturing Silicon Carbide Ingot
27 Jan 22
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Methods for Producing a Monocrystalline Ingot by Horizontal Magnetic Field Czochralski
27 Jan 22
Methods for producing monocrystalline silicon ingots by horizontal magnetic field Czochralski are disclosed.
JaeWoo Ryu, Carissima Marie Hudson, JunHwan Ji, WooJin Yoon
Filed: 25 May 21
Utility
Silicon Carbide Wafer and Method of Fabricating the Same
27 Jan 22
A silicon carbide wafer and a method of fabricating the same are provided.
Ching-Shan Lin, Chien-Cheng Liou, Jian-Hsin Lu
Filed: 27 Jul 21
Utility
Automated Semiconductor Substrate Polishing and Cleaning
27 Jan 22
A semiconductor wafer processing system for processing a set of semiconductor wafers includes a controller, a transfer robot controlled by the controller, a wet bath for containing a cleaning solution, and a cassette positioned in the wet bath for holding the set of wafers.
ShinBae Park, SangJun Kim
Filed: 21 Jul 20
Utility
Bonding Wafer Structure and Method of Manufacturing the Same
27 Jan 22
A bonding wafer structure includes a support substrate, a bonding layer, and a silicon carbide (SiC) layer.
Ying-Ru Shih, Wei Li Wu, Hung-Chang Lo
Filed: 7 Jul 21
Utility
High Resistivity Single Crystal Silicon Ingot and Wafer Having Improved Mechanical Strength
30 Dec 21
A method for preparing a single crystal silicon ingot and a wafer sliced therefrom are provided.
Soubir Basak, Igor Peidous, Carissima Marie Hudson, HyungMin Lee, ByungChun Kim, Robert J. Falster
Filed: 10 Sep 21
Utility
Wafer Boats for Supporting Semiconductor Wafers In a Furnace
30 Dec 21
A wafer boat for supporting a plurality of semiconductor wafers in a furnace is disclosed.
Sumeet S. Bhagavat, Qingmin Liu
Filed: 23 Jun 21
Utility
Semiconductor device and manufacturing method thereof
28 Dec 21
A semiconductor device and a manufacturing method thereof are provided.
Hsien-Chin Chiu, Ying-Ru Shih
Filed: 30 Dec 19
Utility
Semiconductor Substrate Polishing with Polishing Pad Temperature Control
23 Dec 21
A method of preheating a polishing pad of a semiconductor wafer polishing system includes heating a fluid to a first predetermined temperature.
Masaaki Ikeda
Filed: 17 Jun 20
Utility
Method for Collecting Dust from Single Crystal Growth System and Dust Collecting System Thereof
23 Dec 21
A dust collecting system for single crystal growth system includes an air compressor, a dust collecting device, a first inert gas source, a rotary pump and a scrubber.
Masami Nakanishi, YU-SHENG SU, I-CHING LI
Filed: 22 Jun 20
Utility
Epitaxy substrate and method of manufacturing the same
14 Dec 21
An epitaxy substrate and a method of manufacturing the same are provided.
Ying-Ru Shih, Chih-Yuan Chuang, Chi-Tse Lee, Chun-I Fan, Wen-Ching Hsu
Filed: 15 Mar 19
Utility
High Resistivity Semiconductor-on-insulator Wafer and a Method of Manufacture
9 Dec 21
A semiconductor on insulator multilayer structure is provided.
Igor Peidous, Lu Fei, Jeffrey L. Libbert, Andrew M. Jones, Alex Usenko, Gang Wang, Shawn George Thomas, Srikanth Kommu
Filed: 25 Aug 21
Utility
Method for Producing Si Ingot Single Crystal, Si Ingot Single Crystal, and Apparatus Thereof
25 Nov 21
A method for producing Si ingot single crystal by NOC growth method including a Si ingot single crystal growing step and a continuous growing step is provided.
Kazuo Nakajima, Masami Nakanishi, Yu Sheng Su, Wen-Ching Hsu
Filed: 19 May 21
Utility
Single Crystal Silicon Ingot Having Axial Uniformity
25 Nov 21
A method for growing a single crystal silicon ingot by the continuous Czochralski method is disclosed.
Carissima Marie Hudson, Jae-Woo Ryu
Filed: 4 Aug 21
Utility
Methods for Growing a Nitrogen Doped Single Crystal Silicon Ingot Using Continuous Czochralski Method
25 Nov 21
A method for growing a single crystal silicon ingot by the continuous Czochralski method is disclosed.
Carissima Marie Hudson, Jae-Woo Ryu
Filed: 4 Aug 21
Utility
High resistivity silicon-on-insulator wafer manufacturing method for reducing substrate loss
23 Nov 21
A multilayer composite structure and a method of preparing a multilayer composite structure are provided.
Qingmin Liu
Filed: 6 May 20
Utility
Light assisted platelet formation facilitating layer transfer from a semiconductor donor substrate
16 Nov 21
A method is disclosed for promoting the formation of uniform platelets in a monocrystalline semiconductor donor substrate by irradiating the monocrystalline semiconductor donor substrate with light.
Gang Wang, Charles Lottes
Filed: 9 Apr 19
Utility
Systems and Methods for Production of Low Oxygen Content Silicon
11 Nov 21
A method for producing a silicon ingot includes withdrawing a seed crystal from a melt that includes melted silicon in a crucible that is enclosed in a vacuum chamber containing a cusped magnetic field.
Gaurab Samanta, Parthiv Daggolu, Sumeet Bhagavat, Soubir Basak, Nan Zhang
Filed: 20 Jul 21