386 patents
Page 9 of 20
Utility
Systems and Methods for a Preheat Ring In a Semiconductor Wafer Reactor
30 Jun 22
A reaction apparatus includes an upper dome, a lower dome, an upper liner, a lower liner, and a preheat ring.
Chieh Hu, Chun-Chin TU
Filed: 31 Dec 20
Utility
Additive Feed Systems, Ingot Puller Apparatus and Methods for Forming a Single Crystal Silicon Ingot with Use of Such Additive Feed Systems
30 Jun 22
Additive feed systems for feeding at least two different additives to silicon disposed within a crucible of an ingot puller apparatus are disclosed.
Marco Zardoni, Giancarlo Zago, Giorgio Agostini, Stephan Haringer, James Eoff
Filed: 30 Dec 20
Utility
Epitaxial Structure
23 Jun 22
An epitaxial structure includes a substrate, a nucleation layer on the substrate, a buffer layer on the nucleation layer, and a nitride layer on the buffer layer.
Jia-Zhe Liu, Yen-Lun Huang, Ying-Ru Shih
Filed: 9 Mar 22
Utility
Epitaxial Structure
23 Jun 22
An epitaxial structure includes a substrate, a nucleation layer on the substrate, a buffer layer on the nucleation layer, and a nitride layer on the buffer layer.
Jia-Zhe Liu, Yen-Lun Huang, Ying-Ru Shih
Filed: 9 Mar 22
Utility
Epitaxial Structure
23 Jun 22
An epitaxial structure includes a substrate, a nucleation layer, a buffer layer, and a nitride layer orderly.
Jia-Zhe Liu, Yen-Lun Huang, Ying-Ru Shih
Filed: 9 Mar 22
Utility
Semiconductor substrate polishing methods
21 Jun 22
Polishing slurries for polishing semiconductor substrates are disclosed.
Hui Wang, Vandan Tanna, Tracy Michelle Ragan, James Raymond Capstick
Filed: 29 Sep 20
Utility
Methods for processing semiconductor wafers having a polycrystalline finish
7 Jun 22
A method of processing a semiconductor wafer includes depositing a silicon layer on the semiconductor wafer.
Guoqiang David Zhang, Mark Crooks, Tracy Michelle Ragan
Filed: 15 Jun 20
Utility
Ingot Puller Apparatus Having Heat Shields with Voids Therein
2 Jun 22
Ingot puller apparatus for preparing a single crystal silicon ingot by the Czochralski method are disclosed.
Jiaying Ke, Sumeet S. Bhagavat, Jaewoo Ryu, Benjamin Meyer, William Luter, Carissima Marie Hudson
Filed: 7 Oct 21
Utility
Liner assemblies for substrate processing systems
31 May 22
A liner assembly for a substrate processing system includes a first liner and a second liner.
Arash Abedijaberi, Shawn George Thomas
Filed: 28 Dec 18
Utility
System for introducing dopant into a melt of semiconductor or solar-grade material via a feed tube
31 May 22
A method of growing a doped monocrystalline ingot using a crystal growing system is provided.
Stephan Haringer, Marco D'Angella, Mauro DiodÃ
Filed: 28 Dec 18
Utility
Methods for Preparing a Soi Structure
26 May 22
Methods for removing an oxide film from a silicon-on-insulator structure are disclosed.
Charles R. Lottes, Shawn George Thomas, Henry Frank Erk
Filed: 8 Feb 22
Utility
Epitaxial structure
17 May 22
An epitaxial structure includes a substrate, a buffer layer, a back diffusion barrier layer, a channel layer formed on the back diffusion barrier layer, and a barrier layer formed on the channel layer.
Jia-Zhe Liu, Ying-Ru Shih
Filed: 26 May 20
Utility
Methods for Preparing an Ingot In an Ingot Puller Apparatus and Methods for Selecting a Side Heater Length for Such Apparatus
12 May 22
Methods for preparing an ingot in an ingot puller apparatus are disclosed.
Maria Porrini, Sergio Morelli, Mauro DiodÃ
Filed: 12 Nov 20
Utility
Methods for Forming a Single Crystal Silicon Ingot with Reduced Crucible Erosion
12 May 22
Methods for forming a single crystal silicon ingot with reduced crucible erosion are disclosed.
Richard Joseph Phillips, Salvador Zepeda
Filed: 20 Jan 21
Utility
Methods for Forming a Silicon Substrate with Reduced Grown-in Nuclei for Epitaxial Defects and Methods for Forming an Epitaxial Wafer
12 May 22
Methods for preparing single crystal silicon substrates for epitaxial growth are disclosed.
Pietro Valcozzena, Maria Porrini, Januscia Duchini
Filed: 17 Dec 20
Utility
Systems and Methods for Enhanced Machine Learning Using Hierarchical Prediction and Compound Thresholds
12 May 22
A computer device is programmed to receive a plurality of real-time datasets from one or more sensors associated with a tool to be analyzed, calibrate the plurality of real-time datasets, generate a time slide window for each real-time dataset of the plurality of real-time datasets, generate a random probability distribution curve, compare the random probability distribution curve to each time slide window to determine if the time slide window includes anomaly data, and generate prediction results based on the comparison.
Guang-Shin Chen, Chun-Hsien Tu, Tsz-En Hung
Filed: 9 Nov 21
Utility
Methods for forming a unitized crucible assembly
10 May 22
Methods for forming a unitized crucible assembly for holding a melt of silicon for forming a silicon ingot are disclosed.
Richard Joseph Phillips, Salvador Zepeda, Patrick Fredrick Boegemann, III, William Luter
Filed: 20 Feb 20
Utility
Mono-crystalline silicon growth apparatus
10 May 22
A mono-crystalline silicon growth apparatus includes a furnace, a support base, a crucible, a heating module disposed outside of the crucible, and a heat adjusting module above the crucible.
Chun-Hung Chen, Hsing-Pang Wang, Wen-Ching Hsu, I-Ching Li
Filed: 27 Dec 19
Utility
Crystal Pulling Systems Having Fluid-filled Exhaust Tubes That Extend Through the Housing
5 May 22
Crystal pulling systems having a fluid-cooled exhaust tube are disclosed.
Stephan Haringer, Marco Zardoni, Mauro Dioda, Hariprasad Sreedharamurthy
Filed: 7 Oct 21
Utility
Methods for Forming a Unitized Crucible Assembly
28 Apr 22
Methods for forming a unitized crucible assembly for holding a melt of silicon for forming a silicon ingot are disclosed.
Richard Joseph Phillips, Salvador Zepeda, Patrick Fredrick Boegemann, III, William Luter
Filed: 7 Jan 22