386 patents
Page 10 of 20
Utility
Crystal pulling systems and methods for producing monocrystalline ingots with reduced edge band defects
26 Apr 22
A crystal pulling system for growing a monocrystalline ingot from a melt of semiconductor or solar-grade material includes a crucible for containing the melt of material, a pulling mechanism configured to pull the ingot from the melt along a pull axis, and a multi-stage heat exchanger defining a central passage for receiving the ingot as the ingot is pulled by the pulling mechanism.
Soubir Basak, Gaurab Samanta, Parthiv Daggolu, Benjamin Michael Meyer, William L. Luter, Jae Woo Ryu, Eric Michael Gitlin
Filed: 19 Oct 16
Utility
Epitaxial structure
26 Apr 22
An epitaxial structure includes a substrate, a nucleation layer, a buffer layer, and a nitride layer.
Jia-Zhe Liu, Yen-Lun Huang, Ying-Ru Shih
Filed: 26 Jun 19
Utility
Direct formation of hexagonal boron nitride on silicon based dielectrics
29 Mar 22
A scalable process for fabricating graphene/hexagonal boron nitride (h-BN) heterostructures is disclosed herein.
Vikas Berry, Sanjay Behura, Phong Nguyen, Michael R. Seacrist
Filed: 24 Dec 19
Utility
Apparatus for stressing semiconductor substrates
22 Mar 22
Apparatus for use in preparing heterostructures having a reduced concentration of defects including apparatus for stressing semiconductor substrates to allow them to conform to a crystal having a different crystal lattice constant.
Robert J. Falster, Vladimir V. Voronkov, John A. Pitney, Peter D. Albrecht
Filed: 11 Jun 19
Utility
Methods for removing an oxide film from a SOI structure and methods for preparing a SOI structure
22 Mar 22
Methods for removing an oxide film from a silicon-on-insulator structure are disclosed.
Charles R. Lottes, Shawn George Thomas, Henry Frank Erk
Filed: 30 Oct 20
Utility
Cleaved Semiconductor Wafer Imaging System
17 Mar 22
A semiconductor wafer processing system for processing a semiconductor wafer includes a semiconductor wafer processing station for processing the semiconductor wafer and a semiconductor wafer imaging system that images the semiconductor wafer after the semiconductor wafer processing station processes the semiconductor wafer.
Benjamin Michael Meyer, Justin Scott Kayser, John F. Valley, James Dean Eoff, Vandan Tanna, William L. Luter
Filed: 13 Sep 21
Utility
Method of Processing a Cleaved Semiconductor Wafer
17 Mar 22
A method of detecting defects on a semiconductor wafer includes directing diffuse light to the semiconductor wafer and reflecting the diffuse light off of the semiconductor wafer.
Benjamin Michael Meyer, Justin Scott Kayser, John F. Valley, James Dean Eoff, Vandan Tanna, William L. Luter
Filed: 13 Sep 21
Utility
Cleaved Semiconductor Wafer Camera System
17 Mar 22
A semiconductor wafer imaging system for imaging a semiconductor wafer includes shroud panels defining a black box, a camera positioned in the black box for imaging the semiconductor wafer, and an illumination panel for directing diffuse light to the semiconductor wafer.
Benjamin Michael Meyer, Justin Scott Kayser, John F. Valley, James Dean Eoff, Vandan Tanna, William L. Luter
Filed: 13 Sep 21
Utility
Apparatus for stressing semiconductor substrates
15 Mar 22
Apparatus for use in preparing heterostructures having a reduced concentration of defects including apparatus for stressing semiconductor substrates to allow them to conform to a crystal having a different crystal lattice constant.
Robert J. Falster, Vladimir V. Voronkov, John A. Pitney, Peter D. Albrecht
Filed: 11 Jun 19
Utility
Apparatus for stressing semiconductor substrates
15 Mar 22
Apparatus for use in preparing heterostructures having a reduced concentration of defects including apparatus for stressing semiconductor substrates to allow them to conform to a crystal having a different crystal lattice constant.
Robert J. Falster, Vladimir V. Voronkov, John A. Pitney, Peter D. Albrecht
Filed: 11 Jun 19
Utility
Direct formation of hexagonal boron nitride on silicon based dielectrics
15 Mar 22
A scalable process for fabricating graphene/hexagonal boron nitride (h-BN) heterostructures is disclosed herein.
Vikas Berry, Sanjay Behura, Phong Nguyen, Michael R. Seacrist
Filed: 24 Dec 19
Utility
Crystal Pulling Systems Having a Cover Member for Covering the Silicon Charge and Methods for Growing a Melt of Silicon In a Crucible Assembly
3 Mar 22
Crystal pulling system having a housing and a crucible assembly are disclosed.
Paolo Tosi, Matteo Pannocchia, Roberto Scala
Filed: 6 Aug 21
Utility
Window for Chemical Vapor Deposition Systems and Related Methods
24 Feb 22
A system for depositing a layer on a substrate includes a processing chamber defining a gas inlet for introducing gas into the processing chamber and a gas outlet to allow the gas to exit the processing chamber.
Chun-Chin Tu, Manabu Hamano, Lunghsing Hsu
Filed: 12 Aug 21
Utility
High Resistivity Single Crystal Silicon Ingot and Wafer Having Improved Mechanical Strength
24 Feb 22
A method for preparing a single crystal silicon ingot and a wafer sliced therefrom are provided.
Soubir Basak, Igor Peidous, Carissima Marie Hudson, HyungMin Lee, ByungChun Kim, Robert J. Falster
Filed: 10 Sep 21
Utility
Manufacturing Method of Silicon Carbide Ingot
17 Feb 22
A manufacturing method of a silicon carbide ingot includes the following.
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Silicon Carbide Wafer and Method of Fabricating the Same
17 Feb 22
A silicon carbide wafer is provided, wherein within a range area of 5 mm from an edge of the silicon carbide wafer, there are no low angle grain boundaries formed by clustering of basal plane dislocation defects, and the silicon carbide wafer has a bowing of less than 15 μm.
Ching-Shan Lin
Filed: 27 Jul 21
Utility
High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency
1 Feb 22
A multilayer semiconductor on insulator structure is provided in which the handle substrate and an epitaxial layer in interfacial contact with the handle substrate comprise electrically active dopants of opposite type.
Gang Wang, Jeffrey L. Libbert, Shawn George Thomas, Qingmin Liu
Filed: 30 Sep 20
Utility
Method of Fabricating Silicon Carbide Material
27 Jan 22
A method of fabricating a silicon carbide material is provided.
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Silicon Carbide Seed Crystal and Method of Manufacturing the Same, and Method of Manufacturing Silicon Carbide Ingot
27 Jan 22
Ching-Shan Lin
Filed: 27 Jul 21
Utility
Manufacturing Method of Silicon Carbide Wafer and Semiconductor Structure
27 Jan 22
A manufacturing method of a silicon carbide wafer includes the following.
Ching-Shan Lin
Filed: 27 Jul 21