7578 patents
Page 19 of 379
Utility
Substrate holder replacement with protective disk during pasting process
14 Nov 23
A shutter disc for use in a cluster tool assembly having a processing chamber and a transfer arm includes an inner disc and an outer disc configured to be disposed on the inner disc.
Srinivasa Rao Yedla, Kirankumar Neelasandra Savandaiah, Thomas Brezoczky, Bhaskar Prasad, Nitin Bharadwaj Satyavolu
Filed: 27 Jul 20
Utility
Multi-wafer volume single transfer chamber facet
14 Nov 23
Embodiments of the disclosure are directed to load lock chambers and methods of using load lock chambers.
William T. Weaver, Andrew J. Constant, Shay Assaf, Jacob Newman
Filed: 22 Sep 20
Utility
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14 Nov 23
In one implementation, an integrated processing tool for the deposition and processing of lithium metal in energy storage devices.
Subramanya P. Herle, Dieter Haas
Filed: 24 Feb 21
Utility
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14 Nov 23
An enclosure system includes multiple walls forming an interior volume.
Phillip Alfred Criminale, Zhiqiang Guo, Andrew S. C. Ho, Rachel Sara Stolzman, Michael Carl Hankes
Filed: 2 Mar 22
Utility
1w4oywc7idjkrai66gctcs d7622o
14 Nov 23
A heater assembly having a backside purge gap formed between a top plate and a heater of the heater assembly, the top plate having a top plate wall.
Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Kartik Shah, Ashutosh Agarwal, Eric J. Hoffmann, Sanjeev Baluja, Vijay D. Parkhe
Filed: 26 Mar 21
Utility
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14 Nov 23
An apparatus may include a drift tube assembly, the drift tube assembly defining a triple gap configuration, and arranged to accelerate and transmit an ion beam along abeam path.
Frank Sinclair, Wai-Ming Tam, Costel Biloiu, William Davis Lee
Filed: 29 Jan 21
Utility
3d17tjmku7b0rdawmidzvbz4cuzu1l3u14lyvheyfe2uh
14 Nov 23
Examples herein relate to three-dimensional (3D) dynamic random access memory (DRAM) and corresponding methods.
Chang Seok Kang, Tomohiko Kitajima, Sung-Kwan Kang, Fredrick Fishburn, Gill Yong Lee, Nitin K. Ingle
Filed: 27 Sep 21
Utility
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14 Nov 23
Embodiments of the disclosure provide methods and apparatus for fabricating magnetic tunnel junction (MTJ) structures on a substrate in for hybrid (or called integrated) spin-orbit-torque magnetic spin-transfer-torque magnetic random access memory (SOT-STT MRAM) applications.
Hsin-wei Tseng, Chando Park, Jaesoo Ahn, Lin Xue, Mahendra Pakala
Filed: 19 Jul 21
Utility
0jct48gspx1dmuwhfouxxfnznw2ztsmx7k9m594zzw603d r1idfozhehta
9 Nov 23
This disclosure pertains to coated drug compositions and methods of preparing coated drug compositions with a low temperature o-zone based silicon oxide coating.
Fei Wang, Geetika Bajaj, Pravin K. Narwankar
Filed: 19 May 23
Utility
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9 Nov 23
Exemplary carrier heads for a chemical mechanical polishing apparatus may include a carrier body.
Jeonghoon Oh, Andrew Nagengast, Steven M. Zuniga, Eric L. Lau, Hari Prasath Rajendran, Satish Radhakrishnan, Kuen-Hsiang Chen, Ekaterina A. Mikhaylichenko
Filed: 3 May 22
Utility
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9 Nov 23
A chemical mechanical polishing apparatus includes a platen having a top surface to hold a polishing pad, a carrier head to hold a substrate against a polishing surface of the polishing pad during a polishing process, and a temperature monitoring system.
Hari Soundararajan, Shou-Sung Chang, Haosheng Wu, Jianshe Tang
Filed: 21 Jul 23
Utility
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9 Nov 23
Exemplary carrier heads for a chemical mechanical polishing apparatus may include a carrier body.
Jeonghoon Oh, Brian J. Brown, Huanbo Zhang, Andrew Nagengast, Steven M. Zuniga, Ekaterina A. Mikhaylichenko, Eric L. Lau, Jay Gurusamy, David J. Lischka
Filed: 3 May 22
Utility
ofh4qoa03ijlmoh5upqbjarrnpezvykdbxgxtflnmla3kfo2ej
9 Nov 23
An apparatus comprises a flexible membrane for use with a carrier head of a substrate chemical mechanical polishing apparatus.
Young J. Paik, Ashish Bhatnagar, Kadthala Ramaya Narendrnath
Filed: 12 Jul 23
Utility
lxl2j3lvjc0r6zcj975dav2p0vgyg97kpvxgdgstd33oqfkwj
9 Nov 23
Exemplary methods of semiconductor processing may include providing a silicon-containing precursor to a processing region of a semiconductor processing chamber.
Supriya Ghosh, Susmit Singha Roy, Abhijit Basu Mallick
Filed: 5 May 22
Utility
butgdhib3i0qltr6c2grj3ngycr0z6kla0drswh8yqdt7ga7x3p35d6
9 Nov 23
Embodiments of the present disclosure relate to methods, systems, and apparatus for inkjet printing self-assembled monolayer (SAM) structures on substrates.
Yingdong LUO, Rami HOURANI, Xiaopei DENG, Kang LUO, Erica CHEN, Ludovic GODET
Filed: 2 May 23
Utility
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9 Nov 23
Exemplary methods of semiconductor processing may include providing a silicon-containing precursor and a carbon-containing precursor to a processing region of a semiconductor processing chamber.
Zeqing Shen, Susmit Singha Roy, Abhijit Basu Mallick
Filed: 5 May 22
Utility
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9 Nov 23
Embodiments disclosed herein include a processing tool.
David Coumou
Filed: 5 May 22
Utility
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9 Nov 23
Exemplary methods of semiconductor processing may include providing a carbon-containing precursor to a processing region of a semiconductor processing chamber.
Supriya Ghosh, Susmit Singha Roy, Abhijit Basu Mallick, Shuchi Sunil Ojha, Praket Prakash Jha, Rui Cheng
Filed: 5 May 22
Utility
5gvl76fxruscjcvnr64dgoz08fjuado6iz957h9m18u1
9 Nov 23
Embodiments disclosed herein include a process power controller for a plasma processing tool.
David Coumou, Zhi Wang, Tao Zhang, David Peterson
Filed: 5 May 22
Utility
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9 Nov 23
Exemplary semiconductor substrate carrier frames may include a frame body defining a central aperture.
Jason A. Rye
Filed: 3 May 22